JPH0350335U - - Google Patents
Info
- Publication number
- JPH0350335U JPH0350335U JP11197589U JP11197589U JPH0350335U JP H0350335 U JPH0350335 U JP H0350335U JP 11197589 U JP11197589 U JP 11197589U JP 11197589 U JP11197589 U JP 11197589U JP H0350335 U JPH0350335 U JP H0350335U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processed
- mounting tray
- low
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11197589U JP2501798Y2 (ja) | 1989-09-25 | 1989-09-25 | 低温処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11197589U JP2501798Y2 (ja) | 1989-09-25 | 1989-09-25 | 低温処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0350335U true JPH0350335U (en]) | 1991-05-16 |
| JP2501798Y2 JP2501798Y2 (ja) | 1996-06-19 |
Family
ID=31660432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11197589U Expired - Fee Related JP2501798Y2 (ja) | 1989-09-25 | 1989-09-25 | 低温処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2501798Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106460276A (zh) * | 2015-03-24 | 2017-02-22 | 株式会社爱克斯山崎 | 多片布的缝合以及其缝合用缝纫机 |
-
1989
- 1989-09-25 JP JP11197589U patent/JP2501798Y2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106460276A (zh) * | 2015-03-24 | 2017-02-22 | 株式会社爱克斯山崎 | 多片布的缝合以及其缝合用缝纫机 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2501798Y2 (ja) | 1996-06-19 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |